This inventor holds 2 USPTO granted patents. Top assignee: Speedfam-Ipec Corporation. Active years: 2002-2004.
Company Filing History:
Years Active: 2002-2004
Title: Innovations by Frank Krupa in Semiconductor Cleaning Technology
Introduction
Frank Krupa is an accomplished inventor based in Phoenix, AZ, known for his contributions to semiconductor cleaning technology. With a total of 2 patents, he has made significant advancements in the field, particularly in the design and functionality of wafer cleaning apparatuses.
Latest Patents
One of Frank's latest patents is a multiple vertical wafer cleaner. This innovative apparatus comprises a first module featuring a spaced-apart brush assembly with both inner and outer brushes, each equipped with brush pads and platens. The second module mirrors this design, allowing for the effective scrubbing of vertically disposed semiconductor wafers in tanks. The unique configuration of motorized, rotating, opposed, pancake-shaped brushes enables the wafers to rotate in sync with the brushes, ensuring thorough cleaning. Additionally, the tanks can hold a cleaning solution and utilize a megasonic transducer, allowing for optimal cleaning conditions.
Another notable patent is a method for removing debris from cleaning pads used in workpiece cleaning equipment. This method involves cyclically compressing the cleaning pads against one another while rinsing them with a fluid. This process effectively removes debris that becomes embedded in the cleaning pads, enhancing their performance and longevity.
Career Highlights
Frank Krupa is currently employed at Speedfam-Ipec Corporation, where he continues to innovate and develop advanced cleaning technologies for the semiconductor industry. His work has significantly impacted the efficiency and effectiveness of wafer cleaning processes.
Collaborations
Throughout his career, Frank has collaborated with notable colleagues, including Yakov Epshteyn and Ellis G. Harvey. These partnerships have fostered a creative environment that encourages the development of cutting-edge technologies.
Conclusion
Frank Krupa's contributions to semiconductor cleaning technology through his patents and work at Speedfam-Ipec Corporation highlight his role as a key innovator in the field. His advancements not only improve cleaning processes but also enhance the overall efficiency of semiconductor manufacturing.