Shanghai, China

Xiaoqing Yang


 

Average Co-Inventor Count = 3.4

ph-index = 1

Forward Citations = 2(Granted Patents)


Company Filing History:


Years Active: 2015-2019

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2 patents (USPTO):Explore Patents

Title: Innovations of Xiaoqing Yang

Introduction

Xiaoqing Yang is a notable inventor based in Shanghai, China. He has made significant contributions to the field of electronics and equipment through his innovative inventions. With a total of 2 patents, Yang has demonstrated his expertise and creativity in developing advanced technologies.

Latest Patents

Yang's latest patents include an "Apparatus for detecting degree of particulate contamination on flat panel" and a "Backside alignment apparatus and method." The first patent describes an apparatus designed to detect the degree of particulate contamination on flat panels. It features an illuminator that produces a radiation beam, resulting in scattered radiation from contaminants and reflected radiation from the panel's surface. A detector collects the scattered radiation, while a beam trimmer separates the reflected radiation from the scattered radiation.

The second patent outlines a backside alignment apparatus and method for determining the positional relationship between a substrate and a workpiece stage. This apparatus includes an illumination system that emanates infrared light, a workpiece stage assembly for supporting the substrate, and an imaging apparatus for detecting alignment marks. The system is designed to illuminate and align different alignment marks using a single set of illumination apparatus.

Career Highlights

Xiaoqing Yang has worked with prominent companies such as Shanghai Micro Electronics Equipment Co., Ltd. and Shanghai Micro Electronics Equipment (Group) Co., Ltd. His experience in these organizations has allowed him to refine his skills and contribute to the advancement of microelectronics.

Collaborations

Yang has collaborated with talented individuals in his field, including Bing Xu and Yuefei Chen. These partnerships have fostered innovation and creativity in his projects.

Conclusion

Xiaoqing Yang's contributions to the field of electronics through his patents and collaborations highlight his role as a significant inventor. His work continues to influence advancements in technology and equipment.

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