Shanghai Micro Electronics Equipment (group) Co., Ltd.

Shanghai Micro Electronics Equipment Co., Ltd.

Xiaoqing Yang

Bing Xu

Yuefei Chen

Yongqiang Shen

Xiang Jia

Xueshan Han

An apparatus for detecting a degree of particulate contamination on a flat panel is disclosed, including: an illuminator for producing a radiation beam which results in scattered radiation from its scattering by contaminants on a surface of the flat panel under test and reflected radiation from its reflection by the surface of the flat panel under test; a detector for collecting the scattered radiation, the detector having a radiation collection surface perpendicular to a normal of the surface of the flat panel under test; and a beam trimmer for separating the reflected radiation from the scattered radiation, the beam trimmer including a first optical member, disposed in correspondence with the scattered radiation and configured for directing the scattered radiation to be collected by the detector, and a second optical member disposed in correspondence with the reflected radiation and configured for directing the reflected radiation not to be collected by the detector.

Apparatus for detecting degree of particulate contamination on flat panel

A backside alignment apparatus and method for determining a position relationship between a substrate () and a workpiece stage (). The backside alignment apparatus includes: an illumination apparatus () for emanating infrared light; a workpiece stage assembly () for supporting and moving the substrate (); an imaging apparatus () for detecting alignment marks and calculating positions of the alignment marks, the alignment marks including a reference plate alignment mark () and a backside alignment mark (); and a reference plate assembly () for setting up a relationship between position coordinates of the imaging apparatus () and the workpiece stage assembly (). The illumination apparatus () and the imaging apparatus () are able to illuminate and align different alignment marks using only one set of illumination apparatus.

Backside alignment apparatus and method

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Shanghai, China

Xiaoqing Yang