Company Filing History:
Years Active: 2009-2022
Title: Innovations by Inventor Xiaoming He
Introduction
Xiaoming He, an esteemed inventor based in Arcadia, California, stands out in the field of plasma processing systems. With a portfolio comprising five patents, his contributions have significantly advanced technology in reducing particle defects within plasma etch chambers.
Latest Patents
Xiaoming He's latest patents focus on the method and apparatus for reducing particle defects in plasma etch chambers. His innovative designs include in-situ low pressure chamber cleaning technologies and gas nozzle apparatus that employ in-situ deposited chamber coatings. Specifically, these patents detail certain cleaning embodiments for conductor etch applications that utilize an NF-based plasma clean performed at pressures below 30 mT. This process effectively removes in-situ deposited SiO coatings from the interior surfaces of gas nozzle holes. His designs also feature a gas nozzle with bottom holes that are dimensioned sufficiently small to mitigate or prevent the build-up of SiO deposits on nozzle hole interiors.
Career Highlights
Throughout his career, Xiaoming He has made a mark by working with notable companies such as Applied Materials, Inc. and Avery Dennison Corporation. His experiences in these organizations have contributed to his expertise and the innovative solutions he has developed in the field of plasma processing technology.
Collaborations
Xiaoming He has collaborated with various talented individuals in his field, including Jennifer Y. Sun and Kenneth S. Collins. Such partnerships have likely fostered an environment of creativity and shared knowledge, aiding in the development of his groundbreaking patents.
Conclusion
Xiaoming He's contributions to science and technology through his five patents highlight his importance in the realm of plasma processing systems. His innovative methods for reducing particle defects will undoubtedly continue to influence the industry for years to come, showcasing the critical role inventors play in advancing technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.