This inventor holds 7 USPTO granted patents. Top assignee: Samsung Electronics Co., Ltd.. Active years: 1998-2005.
Location History:
- Seoul, KR (1998 - 2003)
- Kyunggi-do, KR (2001 - 2005)
Company Filing History:
Years Active: 1998-2005
Title: Innovations of Won-Seong Lee in Semiconductor Technology
Introduction
Won-Seong Lee is a prominent inventor based in Kyunggi-do, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 7 patents. His work focuses on improving semiconductor devices and manufacturing processes, showcasing his expertise and innovative spirit.
Latest Patents
Among his latest patents, one notable invention is a semiconductor device having trench isolation. This invention features a structure that protects a nitride liner in the trench during subsequent plasma processing. The design includes a trench formed in a semiconductor substrate, with sidewalls and a bottom. A thermal oxide layer is applied to the bottom and sidewalls of the trench to mitigate substrate damage caused during the etching process. Additionally, a material layer is formed on the thermal oxide layer to prevent oxidation of the trench's bottom and sidewalls. Finally, a protection layer is established on the oxidation barrier layer, and the trench is filled uniformly with a trench fill material.
Another significant patent involves a method of processing a defect source at a wafer edge region in semiconductor manufacturing. This invention addresses the issue of defect sources in the wafer edge region during the etching process of a sacrificial oxide layer. The method provides two solutions: directly removing the defect source using a photoresist pattern or fixing the defect source in place during subsequent cleaning processes.
Career Highlights
Won-Seong Lee is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate and contribute to advancements in semiconductor technology. His work has been instrumental in enhancing the efficiency and reliability of semiconductor devices.
Collaborations
He has collaborated with notable coworkers, including Young-woo Park and Yong-chul Oh, who share his commitment to innovation in the semiconductor field.
Conclusion
Won-Seong Lee's contributions to semiconductor technology through his patents and work at Samsung Electronics Co., Ltd. highlight his role as a leading inventor in the industry. His innovative solutions continue to shape the future of semiconductor manufacturing.