Wo-Tak Wu

Title: Wo-Tak Wu: Innovator in Auger Electron Spectroscopy

Introduction

Wo-Tak Wu is a notable inventor based in Cupertino, California. He has made significant contributions to the field of electron spectroscopy, particularly with his innovative patent related to Auger electron spectrometers. His work has implications for various applications in materials science and surface analysis.

Latest Patents

Wo-Tak Wu holds a patent for an "Auger electron spectrometer with applied magnetic field at target surface." This invention features a scanning electron beam apparatus that includes an electron column for generating a primary electron beam. The apparatus is equipped with a magnetic objective lens that focuses the primary electron beam onto the surface of a target substrate. Additionally, it includes a spectrometer designed to detect Auger electrons emitted from the target substrate's surface. The magnetic objective lens applies a magnetic field strength greater than 10 Gauss and less than 50 Gauss at the target surface, enhancing the performance of the spectrometer.

Career Highlights

Wo-Tak Wu is currently employed at KLA-Tencor Corporation, a leading company in the field of semiconductor process control and yield management. His role at the company allows him to leverage his expertise in electron spectroscopy to contribute to advancements in technology and innovation.

Collaborations

Throughout his career, Wo-Tak Wu has collaborated with esteemed colleagues, including Gabor D. Toth and Rudy Flores Garcia. These collaborations have fostered a productive environment for innovation and have led to significant advancements in their respective fields.

Conclusion

Wo-Tak Wu's contributions to Auger electron spectroscopy exemplify the importance of innovation in scientific research and technology. His patent and work at KLA-Tencor Corporation highlight his role as a key figure in advancing the understanding of surface phenomena.