Kla Tencor Corporation

Wo-Tak Wu

Mehran Nasser-Ghodsi

Rudy Flores Garcia

Gabor D Toth

Ming Lun Yu

Niles MacDonald

Khashayar Shadman

Garrett Pickard

Chris Huang

A scanning electron beam apparatus with an Auger spectrometer. The apparatus includes at least an electron column for generating a primary electron beam, a magnetic objective lens configured to focus the primary electron beam onto a surface of a target substrate, and a spectrometer configured to detect Auger electrons emitted from the surface of the target substrate. The magnetic objective lens applies a magnetic field strength greater than 10 Gauss and less than 50 Gauss at the surface of the target substrate. Other embodiments, aspects and features are also disclosed.

Auger electron spectrometer with applied magnetic field at target surface

Growing community of inventors

Cupertino, CA, United States of America

Wo-Tak Wu