Aalen, Germany

Winfried M Kaiser


Average Co-Inventor Count = 3.9

ph-index = 6

Forward Citations = 225(Granted Patents)


Location History:

  • Aalen, DE (1993 - 2008)
  • Aalen-Unterkochen, DE (2016)

Company Filing History:


Years Active: 1993-2016

Loading Chart...
13 patents (USPTO):Explore Patents

Title: Winfried M. Kaiser: Innovator in Microlithography Technology

Introduction

Winfried M. Kaiser is a prominent inventor based in Aalen, Germany, known for his significant contributions to the field of microlithography. With a total of 13 patents to his name, he has made remarkable advancements in the production of microelectronic components. His innovative work has had a lasting impact on the industry.

Latest Patents

One of his latest patents is a microlithography projection exposure apparatus that features at least two operating states. This apparatus is designed to produce microelectronic components and includes a reflective mask in an object plane. In the first operating state, a first partial region of the mask is illuminated by a first radiation, which has an assigned first centroid direction vector at each point of the first partial region. In the second operating state, a second partial region of the mask is illuminated by a second radiation, with its own assigned centroid direction vector. Notably, the first and second partial regions share a common overlap region, allowing for enhanced functionality.

Another significant patent involves an objective for a microlithography projection system that incorporates at least one fluoride crystal lens. This design aims to reduce the detrimental effects of birefringence on image quality. The lens axis of the crystal lens is oriented substantially perpendicular to the crystallographic planes of the fluoride crystal. When multiple fluoride crystal lenses are used, they are oriented in specific directions to further minimize birefringence-related effects. Additionally, applying a compensation coating to at least one optical element of the objective enhances performance.

Career Highlights

Throughout his career, Winfried M. Kaiser has worked with notable companies such as Carl Zeiss SMT AG and Carl Zeiss Stiftung. His experience in these organizations has contributed to his expertise in microlithography and optical systems.

Collaborations

Winfried has collaborated with esteemed colleagues, including Christian Wagner and Wilhelm Ulrich, further enriching his work and contributions to the field.

Conclusion

Winfried M. Kaiser stands out as a key figure in the advancement of microlithography technology. His innovative patents and collaborations have significantly influenced the production of microelectronic components. His work continues to inspire future developments in the industry.

This text is generated by artificial intelligence and may not be accurate.
Please report any incorrect information to support@idiyas.com
Loading…