Company Filing History:
Years Active: 2008-2014
Title: William Allan Bagley: Innovator in Substrate Support Technology
Introduction
William Allan Bagley is a notable inventor based in Tokyo, Japan. He has made significant contributions to the field of substrate support technology, holding a total of 4 patents. His work focuses on enhancing the efficiency and effectiveness of substrate processing in various applications.
Latest Patents
Among his latest patents, Bagley has developed an active cooling substrate support. This innovative assembly and method control the temperature of a substrate within a process chamber, achieving a temperature uniformity of +/−5° C. The substrate support assembly features a thermally conductive body made from aluminum, a substrate support surface designed for large area glass substrates, embedded heating elements, and cooling channels strategically positioned around the heating elements. Additionally, he has patented a system that incorporates sensors for dynamically detecting substrate breakage and misalignment. This apparatus includes at least two sensors that monitor the presence of a substrate during transfer in a processing system, ensuring precision and reliability.
Career Highlights
William Allan Bagley is currently employed at Applied Materials, Inc., where he continues to innovate and develop advanced technologies. His work has significantly impacted the semiconductor and materials processing industries, contributing to improved manufacturing processes.
Collaborations
Throughout his career, Bagley has collaborated with esteemed colleagues, including Paohuei Lee and Kyung-Tae Kim. These partnerships have fostered a collaborative environment that enhances innovation and drives technological advancements.
Conclusion
William Allan Bagley is a distinguished inventor whose work in substrate support technology has led to several important patents. His contributions continue to influence the industry, showcasing the importance of innovation in advancing technology.