The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2009
Filed:
Feb. 07, 2007
William Allan Bagley, Tokyo, JP;
Paohuei Lee, Fremont, CA (US);
Suhail Anwar, San Jose, CA (US);
Janusz Jozwiak, San Ramon, CA (US);
William Allan Bagley, Tokyo, JP;
Paohuei Lee, Fremont, CA (US);
Suhail Anwar, San Jose, CA (US);
Janusz Jozwiak, San Ramon, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Systems, methods, and apparatus are provided for including a chip embedded in components of electronic device manufacturing systems adapted to sense, store, and/or update at least one of identification, operational-related and process-related information associated with the components. In other aspects of the invention, a processing chamber component having an embedded chip with storage capacity is adapted to record at least one of identification, operational-related and process-related information associated with the component; and to communicate the information from the chip to enable determination of an operational state of the component. Numerous other aspects are disclosed.