Location History:
- Jilin, CN (2021)
- San Jose, CA (US) (2023)
Company Filing History:
Years Active: 2021-2023
Title: Wenhui Li: Innovator in Semiconductor Technology
Introduction
Wenhui Li is a prominent inventor based in Jilin, China, known for his significant contributions to semiconductor technology. With a total of three patents to his name, he has made notable advancements in the field, particularly in methods for depositing silicon-containing materials and analyzing defects in CVD films.
Latest Patents
Wenhui Li's latest patents include innovative methods such as "CD dependent gap fill and conformal films." This patent discloses a method of depositing a silicon-containing material that fills narrow CD features without seams or voids. Additionally, it provides films that conformally form on wider CD features, resulting in superior quality films characterized by low roughness, low defects, and advantageous low deposition rates. Another significant patent is focused on "systems and methods for analyzing defects in CVD films." This technology includes semiconductor processing methods that involve depositing a film of semiconductor material on a substrate. The deposited film is sampled for defects using scanning electron microscopy, allowing for the detection and characterization of defects smaller than 10 nm. The methods also enable adjustments to deposition parameters to reduce the total number of defects in the semiconductor material.
Career Highlights
Wenhui Li is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work at Applied Materials has positioned him as a key player in advancing semiconductor processing technologies. His innovative approaches have contributed to the development of high-quality semiconductor films, which are essential for modern electronic devices.
Collaborations
Wenhui Li has collaborated with notable colleagues such as Praket Prakash Jha and Jung Chan Lee. These collaborations have fostered a productive environment for innovation and have led to the successful development of advanced semiconductor technologies.
Conclusion
Wenhui Li's contributions to semiconductor technology through his patents and work at Applied Materials, Inc. highlight his role as a leading inventor in the field. His innovative methods for film deposition and defect analysis continue to influence the semiconductor industry positively.