Wenbo Yan

Title: Innovations of Wenbo Yan in Silicon Nitride Film Technology

Introduction

Wenbo Yan is a prominent inventor based in Sunnyvale, CA, known for his significant contributions to the field of semiconductor technology. He holds a total of five patents, showcasing his expertise and innovative spirit in developing advanced materials and processing methods.

Latest Patents

Wenbo Yan's latest patents focus on methods and apparatus for low-temperature silicon nitride films. One of his notable inventions involves processing methods for forming a silicon nitride film by exposing a metal surface to a silicon precursor, a nitrogen-containing reactant, and a hydrogen-containing plasma at a temperature less than or equal to about 250° C. This innovative approach allows for the formation of a silicon nitride film with a low etch rate, ensuring that the metal surface remains undamaged during the process.

Career Highlights

Wenbo Yan is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work at Applied Materials has allowed him to push the boundaries of technology and contribute to advancements in material science.

Collaborations

Wenbo has collaborated with talented coworkers such as Cong Trinh and Ning Li, further enhancing the innovative environment at Applied Materials.

Conclusion

Wenbo Yan's contributions to the field of silicon nitride film technology exemplify his dedication to innovation and excellence. His patents not only reflect his technical skills but also his commitment to advancing semiconductor technology.