This inventor holds 4 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2001-2011.
Company Filing History:
Years Active: 2001-2011
Title: Innovations of Wen-Yao Chen in Mask Fabrication
Introduction
Wen-Yao Chen is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of mask fabrication, holding a total of 4 patents. His work focuses on improving the efficiency and accuracy of mask fabrication processes, which are crucial in semiconductor manufacturing.
Latest Patents
Wen-Yao Chen's latest patents include a method and system for mask fabrication process control. This innovative method utilizes statistical process control analysis to enhance the mask fabrication process. A manufacturing model is defined, and a process run of a mask is performed as per this model. A fault detection analysis is conducted to minimize bias in the manufacturing model, and a fine-tuning signal is generated based on the results of this analysis. The process run operation is then adjusted according to the fine-tuning signal. Additionally, he has developed a mask fabrication system that comprises a processing tool, a metrology tool, and a controller. This system processes a mask and inspects it to obtain an inspection result, allowing for the calibration of the manufacturing model based on various data inputs.
Career Highlights
Wen-Yao Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to innovate in the field of semiconductor manufacturing. His expertise in mask fabrication has positioned him as a key player in the industry.
Collaborations
Throughout his career, Wen-Yao Chen has collaborated with notable colleagues, including Yuh-Fong Hwang and Chen-Yu Chang. These collaborations have further enhanced his research and development efforts in mask fabrication technologies.
Conclusion
Wen-Yao Chen's contributions to mask fabrication through his innovative patents and collaborations highlight his significant role in advancing semiconductor manufacturing. His work continues to influence the industry positively.