The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2001
Filed:
Mar. 31, 1999
Applicant:
Inventors:
Yuh-Dean Tsay, Ping-Tung, TW;
Shih-Chieh Liao, Non-Tou, TW;
Li-Ren Lin, Hsin-Chu, TW;
Wen-Yao Chen, Hsin-Chu, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd, Hsin Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65H 1/00 ;
U.S. Cl.
CPC ...
B65H 1/00 ;
Abstract
An interlock system prevents collision of handling equipment and damage to wafers in an automated wafer transport apparatus during manual control by an operator. Sensors are used to sense when wafer transport arms and wafer stage are both in their home positions. A controller is responsive to the sensors for operating the lockout system such that attempted activation of the transport arm by the operator is locked out unless both the stage and the arms are in their home positions. The lockout system preferably comprises normally closed electrical relays.