This inventor holds 3 USPTO granted patents. Top assignees: United Microelectronics Corp., United Silicon Incorporated. Active years: 2000-2003.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Taipei Hsien, TW (2000 - 2001)
- Taipei, TW (2003)
Company Filing History:
3 out of 7,288 
1 out of 54 Years Active: 2000-2003
Title: Innovations by Inventor Wen-Shan Wei
Introduction
Wen-Shan Wei is a notable inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor processing, holding a total of 3 patents. His work focuses on improving the efficiency and effectiveness of various processes in the semiconductor industry.
Latest Patents
One of his latest patents is a method for dry cleaning a metal etching chamber. This innovative method involves introducing a first cleaning process gas into the processing chamber, forming a plasma from this gas, and maintaining it for a specified time. Following this, a second cleaning process gas is introduced, and the plasma is maintained again, effectively removing polymer buildup on the chamber's interior surfaces. This process enhances yield and maintains substrate throughput in plasma processing systems.
Another significant patent by Wen-Shan Wei is a method for forming an inter-layer dielectric layer. This method includes the sequential formation of polysilicon lines and dielectric layers on a substrate. The process involves etching back a spin-on glass layer and forming a cover layer to ensure the integrity of the dielectric structure. This invention contributes to the advancement of semiconductor fabrication techniques.
Career Highlights
Wen-Shan Wei has worked with prominent companies in the semiconductor industry, including United Microelectronics Corporation and United Silicon Incorporated. His experience in these organizations has allowed him to develop and refine his innovative techniques in semiconductor processing.
Collaborations
Throughout his career, Wen-Shan Wei has collaborated with various professionals, including Hsi-Mao Hsiao and Wen-Sheng Chien. These collaborations have fostered a creative environment that has led to the development of groundbreaking technologies in the field.
Conclusion
Wen-Shan Wei's contributions to semiconductor processing through his patents and collaborations highlight his role as an influential inventor in the industry. His innovative methods continue to impact the efficiency of semiconductor manufacturing processes.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile