Wei-Chung Chen

Title: Wei-Chung Chen: Innovator in Semiconductor Technology

Introduction

Wei-Chung Chen is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His innovative methods have advanced the fabrication processes in the semiconductor industry.

Latest Patents

Wei-Chung Chen's latest patents include a method of fabricating local interconnects. This method involves forming a semiconductor with an isolation structure, a transistor, and a conductive layer on the substrate. A dielectric layer with an opening is created, and a part of it is removed through photolithography and etching to expose the gate of the transistor or the conductive layer. A conformal barrier layer is then formed in the via opening, leading to the creation of a conductive plug and the patterning of the barrier layer to establish a local interconnect.

Another notable patent is the method for forming an enhanced field oxide (FOX) region of low voltage devices in a high voltage process. This method includes providing a semiconductor structure with a substrate and two field oxide regions. A key step involves implanting nitrogen into the semiconductor structure, followed by the removal of the silicon nitride layer. Subsequently, a gate oxide layer and a silicon oxynitride layer are formed in-situ.

Career Highlights

Wei-Chung Chen is currently employed at United Microelectronics Corporation, where he continues to innovate in semiconductor technologies. His work has been instrumental in enhancing the efficiency and performance of semiconductor devices.

Collaborations

Throughout his career, Wei-Chung Chen has collaborated with notable colleagues, including Ching-Chun Hwang and C C Hsue. These collaborations have further enriched his contributions to the field.

Conclusion

Wei-Chung Chen's innovative work in semiconductor technology has led to significant advancements in the industry. His patents reflect a deep understanding of fabrication processes, making him a valuable asset to United Microelectronics Corporation and the broader semiconductor community.