Wataru Nakagomi

Title: Wataru Nakagomi: Innovator in Substrate Processing Technology

Introduction

Wataru Nakagomi is a notable inventor based in Yamanashi, Japan. He has made significant contributions to the field of substrate processing technology, holding two patents that showcase his innovative approach to solving complex problems in this area.

Latest Patents

His latest patents include a substrate processing apparatus and a substrate processing method. The substrate processing apparatus is designed to process substrates and features multiple processing modules that perform predetermined processes. It also includes an information display that provides critical error information, such as the substrate involved, the processing module, the timing of the error, and the main cause of the error. Additionally, his patent on the system, method, and storage medium for controlling a processing system focuses on applying an etching process on a wafer. This system includes a transfer/process control unit, a communication unit, a log management unit, and a backup unit, all of which work together to ensure efficient processing and data management.

Career Highlights

Wataru Nakagomi is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics industry. His work at the company has allowed him to develop and refine his innovative technologies, contributing to advancements in substrate processing.

Collaborations

He has collaborated with notable coworkers, including Hiroshi Nakamura and Shouichi Otake, who have also made significant contributions to the field.

Conclusion

Wataru Nakagomi's work in substrate processing technology exemplifies the spirit of innovation and problem-solving. His patents reflect a deep understanding of the complexities involved in substrate processing, making him a valuable contributor to the industry.