The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2025
Filed:
Jun. 25, 2019
Tokyo Electron Limited, Tokyo, JP;
Wataru Nakagomi, Nirasaki, JP;
Tatsuya Mukoyama, Nirasaki, JP;
Kazunori Kazama, Nirasaki, JP;
Shigeru Kubota, Nirasaki, JP;
Sho Ichinose, Nirasaki, JP;
Junya Chizuwa, Nirasaki, JP;
Akihito Komiyama, Nirasaki, JP;
Ryuhei Higashimura, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A substrate processing apparatus is provided. The substrate processing apparatus for processing substrates includes a plurality of processing modules that perform predetermined processes on the substrates, and an information display that displays information about an error that occurred in the predetermined processes. The information display displays, in the same screen, a substrate on which a predetermined process in which the error occurred, a processing module which was performing the predetermined process in which the error occurred, the timing at which the error occurred, and a main cause of the error.