Kazunori Kazama

Title: Kazunori Kazama: Innovator in Substrate Processing Technology

Introduction

Kazunori Kazama is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of five patents. His work focuses on improving the efficiency and reliability of substrate processing apparatuses.

Latest Patents

Kazama's latest patents include a substrate processing apparatus and a substrate processing method. The substrate processing apparatus is designed to process substrates using multiple processing modules that perform specific tasks. It features an information display that provides real-time error information, including the substrate involved, the processing module, the timing of the error, and its main cause. Another notable patent involves a substrate processing apparatus that operates under a vacuum atmosphere. This apparatus includes several processing parts, a gas supply mechanism, and a control part that manages the exhaust and gas supply to maintain consistent internal pressures across the processing parts.

Career Highlights

Kazunori Kazama is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His innovative work has positioned him as a key figure in advancing substrate processing technologies.

Collaborations

Kazama has collaborated with notable coworkers, including Tomoyuki Kudo and Jun Ozawa, contributing to the development of cutting-edge technologies in his field.

Conclusion

Kazunori Kazama's contributions to substrate processing technology through his patents and work at Tokyo Electron Limited highlight his role as an influential inventor. His innovations continue to shape the future of substrate processing in the semiconductor industry.