The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2012
Filed:
Sep. 05, 2008
Hiroshi Nakamura, Yamanashi, JP;
Shouichi Otake, Yamanashi, JP;
Wataru Nakagomi, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A processing systemapplies an etching process on a wafer W in a PMor PM. An ECincludes functions of a transfer/process control unit, a communication unit, a log management unit, and a backup unit, and controls the processing system. The transfer/process control unitcontrols wafer transfer and the etching process. The communication unittransmits to or receives data from each MCand the like. The log management unitregisters log information generated at times of the wafer process and transfer, data communication, and the like in log files (in predetermined storage areas of an HDD). The backup unitcollectively saves the log information stored in the log files in backup files (in other storage areas of the HDD), in response to a timing when an unexpected alarm has been generated.