Wan Yih Lien

Title: The Innovations of Wan Yih Lien

Introduction

Wan Yih Lien is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the development of dynamic random-access memory (DRAM) fabrication methods. With a total of 2 patents to his name, Lien's work has had a considerable impact on the industry.

Latest Patents

One of Lien's latest patents is titled "Method to fabricate embedded DRAM with salicide logic cell structure." This innovative method allows for the formation of salicide on the peripheral logic region of embedded DRAM without the need for a salicide block mask layer. This approach protects the memory cell region and avoids oxide loss in the field oxide. Additionally, the landing plug process in the memory cell region is executed using a self-aligned contact etching process, utilizing a silicon nitride layer as an etching protective layer.

Another significant patent is the "Method of using silicon oxynitride to improve fabricating of DRAM." This method outlines the formation of a DRAM cell within a DRAM circuit, which includes both a periphery region and a cell region. The process involves depositing a silicon oxynitride layer over the gates, which serves as a bottom anti-reflection coating. The method further details the formation of landing pads and bitline pads, along with the creation of metal contacts to enhance the overall efficiency of the DRAM cell.

Career Highlights

Wan Yih Lien is currently employed at Worldwide Semiconductor Manufacturing Corporation, where he continues to innovate in the semiconductor field. His expertise in DRAM technology has positioned him as a key player in the industry, contributing to advancements that enhance memory performance and efficiency.

Collaborations

Throughout his career, Lien has collaborated with esteemed colleagues such as Kung Linliu and Meng-Jaw Cherng. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Wan Yih Lien's contributions to semiconductor technology, particularly in DRAM fabrication, highlight his role as a significant inventor in the field. His innovative patents and collaborations reflect his commitment to advancing technology and improving memory solutions.