Location History:
- Fishkill, NY (US) (2008 - 2009)
- Kyunggi, KR (2009)
Company Filing History:
3 out of 131,214 
2 out of 962 
2 out of 164,108 
Years Active: 2008-2009
Title: Innovations of Wan Jae Park in Semiconductor Technology
Introduction
Wan Jae Park is a notable inventor based in Fishkill, NY (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving processes in photolithography and electrical interconnect structures.
Latest Patents
Wan Jae Park's latest patents include innovative methods for forming mask patterns on semiconductor wafers. These methods compensate for nonuniform center-to-edge etch rates during photolithographic processing. The techniques involve selectively widening portions of a mask pattern adjacent to the outer edge of a semiconductor wafer. This approach aims to achieve more uniform center-to-edge critical dimensions (CD) when the mask pattern is used for photolithographically patterning underlying layers.
Another significant patent involves methods of forming electrical interconnect structures using polymer residues. This process increases etching selectivity through dielectric layers. It includes forming a dielectric layer on a semiconductor substrate and a hard mask layer on top. A patterned photoresist layer is then used as an etching mask to define openings in the hard mask layer. The process accumulates polymer residues on the hard mask layer, enhancing selectivity and inhibiting recession during etching.
Career Highlights
Wan Jae Park has worked with prominent companies in the semiconductor industry, including Samsung Electronics Co., Ltd. and Chartered Semiconductor Manufacturing Ltd. His experience in these organizations has contributed to his expertise and innovative capabilities in semiconductor technology.
Collaborations
Some of Wan Jae Park's notable coworkers include Jae Hak Kim and Tong Qing Chen. Their collaboration has likely fostered a productive environment for innovation and development in their respective fields.
Conclusion
Wan Jae Park's contributions to semiconductor technology through his patents and career experiences highlight his role as an influential inventor. His innovative methods continue to advance the industry and improve manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.