Company Filing History:
Years Active: 2005-2010
Title: Vsevolod Zelenkov: Innovator in Ion Source Technology
Introduction
Vsevolod Zelenkov is a prominent inventor based in Moscow, Russia. He has made significant contributions to the field of ion source technology, holding a total of 4 patents. His innovative work focuses on enhancing the performance and quality of ion sources used in various applications.
Latest Patents
One of Zelenkov's latest patents is titled "Sputtered Contamination Shielding for an Ion Source." This invention addresses the issue of sputtered contaminants that can affect the quality of target substrates. By implementing shielding associated with an ion source, such as an anode layer source, the amount and concentration of contaminants can be significantly reduced. This innovation ensures that the substrate maintains a higher quality by minimizing contamination during the etching process.
Another notable patent is "Longitudinal Cathode Expansion in an Ion Source." This invention introduces a design that allows for longitudinal expansion of the cathode along the length of the anode layer source. The use of cathode covers secures the cathode plates while allowing them to expand, thus relieving stress caused by thermal expansion. This design not only prolongs the life of cathode plates but also maintains the performance requirements of the ion source.
Career Highlights
Zelenkov is currently employed at Veeco Instruments Inc., where he continues to develop innovative solutions in ion source technology. His work has been instrumental in advancing the capabilities of ion sources, making them more efficient and reliable for various applications.
Collaborations
Throughout his career, Zelenkov has collaborated with notable colleagues, including John E. Keem and Mark Krivoruchko. These collaborations have fostered a creative environment that encourages the exchange of ideas and advancements in technology.
Conclusion
Vsevolod Zelenkov is a distinguished inventor whose contributions to ion source technology have made a significant impact in the field. His innovative patents and collaborative efforts continue to drive advancements that enhance the quality and efficiency of ion sources.