The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2006
Filed:
Jul. 21, 2004
Daniel E. Siegfried, Fort Collins, CO (US);
David Matthew Burtner, Fort Collins, CO (US);
Scott A. Townsend, Fort Collins, CO (US);
John Keem, Bloomfield Hills, MI (US);
Valery Alexeyev, Moscow, RU;
Vsevolod Zelenkov, Moscow, RU;
Mark Krivoruchko, Zelenograd, RU;
Daniel E. Siegfried, Fort Collins, CO (US);
David Matthew Burtner, Fort Collins, CO (US);
Scott A. Townsend, Fort Collins, CO (US);
John Keem, Bloomfield Hills, MI (US);
Valery Alexeyev, Moscow, RU;
Vsevolod Zelenkov, Moscow, RU;
Mark Krivoruchko, Zelenograd, RU;
Veeco Instruments, Inc., Woodbury, NY (US);
Abstract
An ion source design and manufacturing techniques allows longitudinal cathode expansion along the length of the anode layer source (ALS). Cathode covers are used to secure the cathode plates to the source body assembly of an ion source. The cathode covers allow the cathode plate to expand along the longitudinal axis of the ion source, thereby relieving the stress introduced by differential thermal expansion. In addition, the cathode cover configuration allows for less expensive cathode plates, including modular cathode plates. Such plates can be adjusted relative to the cathode-cathode gap to prolong the life of a given cathode plate and maintain source performance requirements. A cathode plate in a linear section of an ion source has symmetrical edges and can, therefore, be flipped over to exchange the first (worn) cathode edge with the second (unworn) cathode edge.