Company Filing History:
16 out of 297 
6 out of 838 
1 out of 832,880 Years Active: 1998-2008
Title: Vlasta Brusic Kaufman: Innovator in Chemical Mechanical Polishing
Introduction
Vlasta Brusic Kaufman, based in Geneva, Illinois, is a notable inventor with an impressive portfolio of 23 patents. His work primarily focuses on chemical mechanical polishing technology, which has significant applications in various industries, particularly in semiconductor manufacturing.
Latest Patents
Kaufman's recent patents include an innovative chemical mechanical polishing slurry tailored for copper substrates. This slurry incorporates an oxidizing agent, a complexing agent, and an abrasive, with the possibility of an optional surfactant. Notably, it does not require a separate film-forming agent, making it highly efficient for removing layers of copper alloy, titanium, titanium nitride, tantalum, and tantalum nitride from substrates. Additionally, he has developed chemical mechanical polishing systems and methods that utilize alpha-amino acid containing compositions and slurries, effective for polishing metal and dielectric layers in various substrates.
Career Highlights
His career includes valuable contributions to prominent companies such as Cabot Microelectronics Corporation and Cabot Corporation, where he honed his expertise in the field of chemical mechanical polishing. Through his work, he has advanced the technology that is crucial for achieving precision in semiconductor devices.
Collaborations
Throughout his career, Kaufman has collaborated with esteemed professionals including Shumin Wang and Rodney C. Kistler. These collaborations have further enriched his research and development endeavors, leading to significant innovations in the polishing techniques used in the semiconductor industry.
Conclusion
Vlasta Brusic Kaufman's dedication to innovation in chemical mechanical polishing has made a notable impact on the field. His patents reflect a deep understanding of materials and processes vital for modern manufacturing, establishing him as a key player in advancing technology for future applications.