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Fishkill, NY, United States of America

Virinder S Grewal

USPTO Granted Patents = 5

Average Co-Inventor Count = 1.6

ph-index = 4

Forward Citations = 110(Granted Patents)

Company Filing History:

5 out of 30,045

Siemens Aktiengesellschaft

2 out of 164,197

International Business Machines Corporation

where one patent can have more than one assignee

Years Active: 1996-1999

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5 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6008121 - Etching high aspect contact holes in solid state devices (1999-12-28),

2. 5926689 - Process for reducing circuit damage during PECVD in single wafer PECVD (1999-07-20),

3. 5597438 - Etch chamber having three independently controlled electrodes (1997-01-28),

4. 5591301 - Plasma etching method (1997-01-07),

5. 5529197 - Polysilicon/polycide etch process for sub-micron gate stacks (1996-06-25),

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