Location History:
- Hockessin, DE (US) (2002 - 2004)
- Richardson, TX (US) (2007)
Company Filing History:
5 out of 93 
1 out of 308 
Years Active: 2002-2007
Title: Vikas Sachan: Innovator in Polishing Compositions
Introduction
Vikas Sachan is a notable inventor based in Hockessin, DE (US). He has made significant contributions to the field of polishing compositions, particularly for noble metals and semiconductor structures. With a total of 6 patents to his name, his work has advanced the technology used in chemical-mechanical polishing.
Latest Patents
One of his latest patents is focused on polishing compositions for noble metals. This invention is particularly useful for chemical-mechanical polishing of substrates containing noble metals such as platinum. The composition includes up to about 50% by weight of an adjuvant, abrasive particles ranging from about 0.5% to about 55% by weight, and water-soluble organic additives up to about 10% by weight. The abrasive particles can be selected from a variety of materials, including alumina, ceria, and diamond. These organic additives enhance the dispersion of abrasive particles and improve metal removal rates.
Another significant patent by Sachan is a composition and method for polishing in metal CMP. This invention addresses the polishing of composite semiconductor structures that contain metal layers, barrier layers, and insulating layers. The composition comprises an aqueous medium, an oxidant, and an organic polymer that helps to attenuate the removal of the oxide film. This innovative approach may also include optional complexing agents and dispersants.
Career Highlights
Vikas Sachan has worked with prominent companies in the industry, including Rodel Holdings, Inc. and Rohm and Haas Electronic Materials CMP Holdings, Inc. His experience in these organizations has contributed to his expertise in developing advanced polishing compositions.
Collaborations
Throughout his career, Sachan has collaborated with notable professionals in the field, including Terence M Thomas and Peter A Burke. These collaborations have likely enriched his work and led to further innovations in polishing technologies.
Conclusion
Vikas Sachan is a distinguished inventor whose work in polishing compositions has made a significant impact in the field. His innovative patents and collaborations reflect his dedication to advancing technology in chemical-mechanical polishing.
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