Vassil Spasov

Title: The Innovative Journey of Vassil Spasov

Introduction

Vassil Spasov, an accomplished inventor based in San Jose, California, has made significant contributions to the field of electron beam technology. With a total of two patents to his name, he has focused on developing advanced methods and apparatuses for inspecting substrates using charged particles.

Latest Patents

Spasov's latest patents showcase his innovative thinking and technical expertise. One notable patent is for an "Electron beam apparatus and inspection method using dual illumination beams with dynamically controllable offsets." This invention features an apparatus for generating dual-energy electron beams, including a first source for lower-energy beams and a second for higher-energy beams. The design incorporates a combining device that merges these beams, as well as controllable electron-beam deflectors that adjust the illuminated areas relative to an image data collection area. Additionally, a moving stage and a time delay integration detection system enhance the apparatus's functionality.

Another remarkable patent is for "High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus." This invention pertains to an apparatus that inspects substrates using charged particles, consisting of an illumination subsystem, an objective subsystem, a projection subsystem, and a beam separator. The detection system integrates a scintillating screen, a detector array, and an optical coupling apparatus that employs both refractive and reflective elements to optimize performance.

Career Highlights

Throughout his career, Vassil Spasov has worked with prominent companies in the technology sector. He has contributed his expertise to both KLA-Tencor Corporation and KLA-Tencor Technologies Corporation, where he was involved in developing cutting-edge solutions for the semiconductor industry.

Collaborations

Vassil has collaborated with several talented professionals in his field, including Marian Mankos and David J. Walker. These collaborations reflect Spasov's commitment to teamwork and innovation, further amplifying the impact of his work.

Conclusion

Vassil Spasov's inventive spirit and technical prowess are evident in his patents and contributions to electron beam technology. As he continues to explore new possibilities within his field, the future of his innovations promises to enhance the efficiency and accuracy of substrate inspection processes. His work exemplifies the vital role inventors play in driving technological advancements.