The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2009
Filed:
Dec. 14, 2006
David Walker, Livermore, CA (US);
Salam Harb, Los Gatos, CA (US);
Vassil Spasov, San Jose, CA (US);
David Stites, St. Petersburg, FL (US);
Izzy Lewis, San Jose, CA (US);
Marian Mankos, Palo Alto, CA (US);
David Walker, Livermore, CA (US);
Salam Harb, Los Gatos, CA (US);
Vassil Spasov, San Jose, CA (US);
David Stites, St. Petersburg, FL (US);
Izzy Lewis, San Jose, CA (US);
Marian Mankos, Palo Alto, CA (US);
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
One embodiment relates to an apparatus for inspecting a substrate using charged particles. The apparatus includes an illumination subsystem, an objective subsystem, a projection subsystem, and a beam separator interconnecting those subsystems. The apparatus further includes a detection system which includes a scintillating screen, a detector array, and an optical coupling apparatus positioned therebetween. The optical coupling apparatus includes both refractive and reflective elements. Other embodiments and features are also disclosed.