Company Filing History:
Years Active: 2021-2025
Title: Tz-Shian Chen: Innovator in Semiconductor Technology
Introduction
Tz-Shian Chen is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of four patents. His work focuses on innovative methods and apparatuses that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
One of Tz-Shian Chen's latest patents is an "Apparatus, system, and method for measuring the temperature of a substrate." This invention describes a temperature measuring apparatus that utilizes a light-emitting source to emit laser pulses directed at a substrate. A detector receives the reflected laser pulses and emission signals related to the substrate's temperature. The apparatus determines the substrate's temperature during thermal processes, employing techniques to improve the signal-to-noise ratio of the reflected laser pulses.
Another notable patent is for "Integrated photoresist removal and laser annealing." This method involves removing light-sensitive material from a workpiece using polarized electromagnetic radiation and subsequently annealing features on the workpiece with electromagnetic radiation that may not be polarized. This innovative approach ensures that the light-sensitive material is effectively removed without contaminating the chamber surfaces.
Career Highlights
Tz-Shian Chen is associated with Taiwan Semiconductor Manufacturing Company Ltd., a leading firm in the semiconductor industry. His work has been instrumental in advancing semiconductor manufacturing techniques, contributing to the company's reputation for innovation and excellence.
Collaborations
Throughout his career, Tz-Shian Chen has collaborated with notable colleagues, including Li-Ting Wang and Yee-Chia Yeo. These collaborations have fostered a productive environment for innovation and have led to significant advancements in semiconductor technology.
Conclusion
Tz-Shian Chen's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence the industry and pave the way for future advancements.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.