Company Filing History:
Years Active: 2021-2025
Title: Tz-Shian Chen: Innovator in Semiconductor Technology
Introduction
Tz-Shian Chen is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of four patents. His work focuses on innovative methods and apparatuses that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
One of Tz-Shian Chen's latest patents is an "Apparatus, system, and method for measuring the temperature of a substrate." This invention describes a temperature measuring apparatus that utilizes a light-emitting source to emit laser pulses directed at a substrate. A detector receives the reflected laser pulses and emission signals related to the substrate's temperature. The apparatus determines the substrate's temperature during thermal processes, employing techniques to improve the signal-to-noise ratio of the reflected laser pulses.
Another notable patent is for "Integrated photoresist removal and laser annealing." This method involves removing light-sensitive material from a workpiece using polarized electromagnetic radiation and subsequently annealing features on the workpiece with electromagnetic radiation that may not be polarized. This innovative approach ensures that the light-sensitive material is effectively removed without contaminating the chamber surfaces.
Career Highlights
Tz-Shian Chen is associated with Taiwan Semiconductor Manufacturing Company Ltd., a leading firm in the semiconductor industry. His work has been instrumental in advancing semiconductor manufacturing techniques, contributing to the company's reputation for innovation and excellence.
Collaborations
Throughout his career, Tz-Shian Chen has collaborated with notable colleagues, including Li-Ting Wang and Yee-Chia Yeo. These collaborations have fostered a productive environment for innovation and have led to significant advancements in semiconductor technology.
Conclusion
Tz-Shian Chen's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence the industry and pave the way for future advancements.