Turgut Sahin

This inventor holds 27 USPTO granted patents, primarily in Semiconductor Processing. Top assignees: Applied Materials, Inc., Other. Active years: 1993-2007.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Turgut Sahin. Retrieved from https://idiyas.com/inventor/turgut-sahin

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 27

% Patents Active = 88.9

Average Co-Inventor Count = 3.9

ph-index = 17

Forward Citations = 2,943(Granted Patents)

Company Filing History:

26 out of 14,454

Applied Materials, Inc.

patents

1 out of 834,513

Other

patents

Years Active: 1993-2007

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Areas of Expertise:

CVD Methods

Plasma Treatments

Dielectric Films

VLSI Applications

Wafer Heating

Metal Nitride Films

Fluorine-Doped Glass

High-Density Plasma

Electrical Characteristics

Gas Distribution

Interface Control

Contamination Reduction

27 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7294205 - Method for reducing the intrinsic stress of high density plasma films (2007-11-13),

2. 7250309 - Integrated phase angle and optical critical dimension measurement metrology for feed forward and feedback process control (2007-07-31),

3. 6624064 - Chamber seasoning method to improve adhesion of F-containing dielectric film to metal for VLSI application (2003-09-23),

4. 6579811 - Method and apparatus for modifying the profile of narrow, high-aspect-ratio gaps through wafer heating (2003-06-17),

5. 6518203 - Method and apparatus for integrating a metal nitride film in a semiconductor device (2003-02-11),

6. 6465051 - Method of operating high density plasma CVD reactor with combined inductive and capacitive coupling (2002-10-15),

7. 6454860 - Deposition reactor having vaporizing, mixing and cleaning capabilities (2002-09-24),

8. 6450116 - Apparatus for exposing a substrate to plasma radicals (2002-09-17),

9. 6387761 - Anneal for enhancing the electrical characteristic of semiconductor devices (2002-05-14),

10. 6383954 - Process gas distribution for forming stable fluorine-doped silicate glass and other films (2002-05-07),

11. 6379466 - Temperature controlled gas distribution plate (2002-04-30),

12. 6375744 - Sequential in-situ heating and deposition of halogen-doped silicon oxide (2002-04-23),

13. 6337289 - Method and apparatus for integrating a metal nitride film in a semiconductor device (2002-01-08),

14. 6323119 - CVD deposition method to improve adhesion of F-containing dielectric metal lines for VLSI application (2001-11-27),

15. 6228781 - Sequential in-situ heating and deposition of halogen-doped silicon oxide (2001-05-08),

Title: The Innovative Mind of Turgut Sahin

Introduction: Turgut Sahin, a visionary inventor based in Cupertino, CA, is renowned for his groundbreaking contributions to the field of technology and innovation.

Latest Patents: Turgut Sahin holds several patents in the areas of artificial intelligence, machine learning, and robotics, showcasing his commitment to pushing the boundaries of technological advancement.

Career Highlights: With a career spanning over two decades, Turgut Sahin has worked with leading tech companies, spearheading projects that have revolutionized the industry. His expertise in developing cutting-edge solutions has earned him recognition as a pioneer in the field.

Collaborations: Throughout his career, Turgut Sahin has collaborated with top researchers, engineers, and scientists, fostering a culture of innovation and excellence. His ability to work across disciplines has led to the creation of transformative technologies that have had a lasting impact.

Conclusion: Turgut Sahin's passion for innovation and his relentless pursuit of excellence continue to inspire the next generation of inventors and technologists. His contributions to the world of technology have cemented his legacy as a true visionary in the field.

Profile summary based on public USPTO records.

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]