Tsung-Hsun Lee

Title: The Innovative Mind of Tsung-Hsun Lee: Patents and Contributions in Semiconductor Technology

Introduction: Tsung-Hsun Lee, a distinguished inventor based in Kaohsiung, Taiwan, has made significant contributions to the field of semiconductor technology. With a total of five patents to his name, Lee continues to push the boundaries of innovation through his cutting-edge inventions in lithography systems and methodologies.

Latest Patents: Tsung-Hsun Lee's recent patents showcase his expertise in enhancing semiconductor manufacturing processes. One of his notable inventions is the "Width Adjustment of EUV Radiation Beam." This method involves receiving pattern size information from a reticle and accordingly adjusting the width of an extreme ultraviolet (EUV) radiation beam. The process, which includes scanning the adjusted beam onto the reticle, leads to an increase in intensity per unit area after the width adjustment. Another key patent by Lee is the "Lithography System and Lithography Method." This system integrates a light source device that emits processing light onto a semiconductor wafer, generating both penetrating and reflected light beams. The technology features a detecting module with dual detectors to analyze power data and compensate for patterns formed on semiconductor wafers.

Career Highlights: Throughout his career, Tsung-Hsun Lee has held significant positions within prominent companies, including Taiwan Semiconductor Manufacturing Company Limited and Advanced Semiconductor Engineering, Inc. His roles at these organizations have allowed him to work on groundbreaking technologies and advancements in semiconductor fabrication.

Collaborations: Tsung-Hsun Lee has collaborated with various professionals in the industry, notably working alongside his coworkers Ching-Juinn Huang and Po-Chung Cheng. These collaborations have further enriched his understanding of semiconductor technology and contributed to his innovative projects.

Conclusion: Tsung-Hsun Lee’s inventive spirit and contributions to the semiconductor industry underscore his role as a key figure in advancing technology. With five patents and ongoing work in enhancing lithography processes, Lee's impact on the field of semiconductor manufacturing is set to flourish as he continues to explore new frontiers in innovation.