Location History:
- Niigata, JP (2013)
- Nagaoka, JP (2013)
- Osaka, JP (2015)
Company Filing History:
2 out of 2 
2 out of 8,782 
2 out of 19 
Years Active: 2013-2015
Title: Tsuguhiro Tago: Innovator in Etching Technologies
Introduction
Tsuguhiro Tago is a notable inventor based in Osaka, Japan. He has made significant contributions to the field of etching technologies, holding a total of three patents. His work focuses on developing innovative etchant compositions and etching solutions that enhance the precision and quality of various applications.
Latest Patents
One of Tago's latest patents is an etchant composition and etching method. This invention pertains to an etchant composition used to etch a silicon-containing film formed on a target substrate. The composition includes at least one component selected from a group consisting of an organic compound containing a hydroxyl group, an organic compound containing a carbonyl group, inorganic acids and salts, hydrofluoric acid, ammonium fluoride, and organic acids. Another significant patent is an etching solution composition for metal films. This invention aims to provide a solution that enables the etching of metal films in a controllable manner, allowing for the formation of a desired tapered shape and a smooth surface without causing etching solution exudation traces. The solution contains one or more surfactants selected from alkyl sulfate or perfluoroalkenyl phenyl ether sulfonic acid and their salts.
Career Highlights
Throughout his career, Tsuguhiro Tago has worked with prominent companies such as Hayashi Pure Chemical Industry, Ltd. and Sanyo Electric Co., Ltd. His experience in these organizations has contributed to his expertise in the field of etching technologies.
Collaborations
Tago has collaborated with several professionals in his field, including Mayumi Kimura and Atsushi Matsui. These collaborations have likely enriched his work and led to further advancements in etching technologies.
Conclusion
Tsuguhiro Tago is a distinguished inventor whose work in etching technologies has led to innovative solutions that enhance the precision and quality of various applications. His contributions continue to impact the industry positively.