The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2013
Filed:
Jan. 12, 2009
Kazuhiro Fujikawa, Tokyo, JP;
Tsuguhiro Tago, Niigata, JP;
Kazuhiro Fujikawa, Tokyo, JP;
Tsuguhiro Tago, Niigata, JP;
Kanto Kagaku Kabushiki Kaisha, Tokyo, JP;
Sanyo Electric Co., Ltd., Osaka, JP;
Sanyo Semiconductor Manufacturing Co., Ltd., Niigata, JP;
Abstract
The present invention aims to provide an etching solution composition which enables to etch a metal film in a controllable manner, form a desired definite tapered shape, and obtain a smooth surface without causing etching solution exudation trace. Said problems have been solved by the present invention, which is an etching solution composition for etching metal films containing one or more surfactants selected from the group consisting of alkyl sulfate or perfluoroalkenyl phenyl ether sulfonic acid and the salts thereof.