The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2013
Filed:
Jul. 16, 2008
Tsuguhiro Tago, Nagaoka, JP;
Tomotake Matsuda, Taki-gun, JP;
Mayumi Kimura, Matsuzaka, JP;
Tetsuo Aoyama, Ikoma, JP;
Tsuguhiro Tago, Nagaoka, JP;
Tomotake Matsuda, Taki-gun, JP;
Mayumi Kimura, Matsuzaka, JP;
Tetsuo Aoyama, Ikoma, JP;
Hayashi Pure Chemical Ind., Ltd., Osaka-shi, Osaka, JP;
Sanyo Electric Co., Ltd., Moriguchi-shi, Osaka, JP;
SANYO Semiconductor Manufacturing Co., Ltd., Ojiya-shi, Niigata, JP;
Sanyo Semiconductor Co., Ltd., Ora-gun, Gunma, JP;
Abstract
A metal film such as an aluminum film or an aluminum alloy film is etched with good controllability, preventing a resist from bleeding, to have a proper taper configuration and superior flatness. A water solution containing a phosphoric acid, a nitric acid, and an organic acid salt is used as an etching liquid composition used to etch the metal film on a substrate. The organic acid salt is composed of one kind selected from a group consisting of an aliphatic monocarboxylic acid, an aliphatic polycarboxylic acid, an aliphatic oxicarboxylic acid, an aromatic monocarboxylic acid, an aromatic polycarboxylic acid and an aromatic oxycarboxylic acid, and one kind selected from a group consisting of an ammonium salt, an amine salt, a quaternary ammonium salt, and an alkali metal salt. In addition, a concentration of the organic acid salt ranges from 0.1% to 20% by weight. In addition, the etching liquid composition according to the present invention is used when the metal film is formed of aluminum or an aluminum alloy.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile