Location History:
- Yamanashi, JP (2016)
- Nirasaki, JP (2018 - 2021)
- Hillsboro, OR (US) (2022)
Company Filing History:
Years Active: 2016-2022
Title: Toyohiro Kamada: Innovator in Film Forming Technology
Introduction
Toyohiro Kamada is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of film forming technology, holding a total of 5 patents. His work focuses on methods and apparatuses that enhance the efficiency and quality of film formation processes.
Latest Patents
Kamada's latest patents include innovative methods for forming films that contain silicon, carbon, and nitrogen. One of his notable inventions is a film forming method that involves two processes: the first process entails forming a film on a substrate, while the second process involves oxidizing the film with an oxidizing agent containing a hydroxy group and subsequently supplying a nitriding gas. Another significant patent details a method for forming a silicon nitride film that covers stepped portions on a substrate, ensuring uniform growth on the surfaces of base films.
Career Highlights
Kamada is currently associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in advancing film forming technologies, which are crucial for various applications in electronics and materials science.
Collaborations
Throughout his career, Kamada has collaborated with notable colleagues, including Noriaki Fukiage and Takayuki Karakawa. These collaborations have contributed to the development of innovative solutions in the field of film formation.
Conclusion
Toyohiro Kamada's contributions to film forming technology have established him as a key figure in the industry. His innovative patents and collaborations continue to influence advancements in semiconductor manufacturing processes.