This inventor holds 13 USPTO granted patents. Top assignees: Tokyo Electron Limited, Tokyo Electron Kabushiki Kaisha, Tokyo Electron Tohoku Kabushiki Kaisha. Active years: 1991-1998.
Location History:
- Kofu, JP (1991 - 1995)
- Yamanashi, JP (1995)
- Yamanashi-ken, JP (1996 - 1997)
- Inba-Gun, JP (1998)
- Tomisatomachi, JP (1998)
Company Filing History:



Years Active: 1991-1998
Title: Innovations of Towl Ikeda: A Pioneer in Trap and Process Gas Supply Technologies
Introduction
Towl Ikeda, an accomplished inventor based in Kofu, Japan, has made significant contributions to the field of engineering and technology, holding a remarkable 13 patents. His inventions focus on improving efficiency and functionality in systems involving exhaust gas management and process gas supply for industrial applications.
Latest Patents
Among his latest innovations is the **trap apparatus**, designed to be integrated into a vacuum exhaust system. This apparatus effectively traps tramp materials present in exhaust gas, utilizing a sophisticated trapping passage container. The system includes a heating trap that pyrolytically decomposes unwanted materials by heating the exhaust gas to a predetermined temperature. The unique design of the electric heating coil allows for optimal contact with the exhaust gas, enhancing efficiency and ensuring a reliable separation of materials.
Another notable invention is the **process gas supply apparatus**, which facilitates the supply of organic aluminum metallic compounds for film formation processes. This apparatus includes a supply pipeline, force-feed device, and a vaporization system that efficiently manages the flow of compounds. The inclusion of purge gas and solvent introduction devices, along with a control system featuring multiple valves, showcases Ikeda's innovative approach to complex fluid management in industrial processes.
Career Highlights
Throughout his career, Towl Ikeda has been associated with prominent companies, including Tokyo Electron Limited and Tokyo Electron Kabushiki Kaisha. His work has significantly influenced the development of advanced technologies in the semiconductor and materials processing industries, gaining recognition within the engineering community.
Collaborations
Ikeda has collaborated with esteemed colleagues such as Teruo Iwata and Masasi Saito. Together, they have worked towards advancing technology and innovating within their respective fields, contributing to the success of various projects and enhancing their collective expertise.
Conclusion
Towl Ikeda's contributions to the engineering domain through his patents and collaborative efforts highlight his status as a leading inventor in his field. His groundbreaking inventions, particularly in trap and process gas supply technologies, not only reflect his innovative spirit but also pave the way for improved industrial practices. As technology continues to evolve, Ikeda's work remains a testament to the power of innovation and ingenuity in solving real-world challenges.