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Tokyo Electron Tohoku Kabushiki Kaisha

USPTO Granted Patents = 44

Forward Citations = 1,826

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68 inventors (with patents filed for the assignee):

Wataru Okase (7 out of 34 patents)

Kenichi Yamaga (6 out of 38 patents)

Katsushin Miyagi (6 out of 9 patents)

4. Tetsu Ohsawa (4 out of 8 patents)

5. Kenji Homma (2 out of 4 patents)

6. Ken Nakao (2 out of 43 patents)

7. Takenobu Matsuo (2 out of 21 patents)

8. Masaaki Hasei (2 out of 6 patents)

9. Hiroyuki Iwai (2 out of 11 patents)

10. Shingo Watanabe (2 out of 17 patents)

11. Hironobu Nishi (2 out of 11 patents)

12. Hirofumi Kitayama (2 out of 14 patents)

13. Osamu Yokokawa (2 out of 4 patents)

14. Takashi Tanahashi (2 out of 14 patents)

15. Naoya Kaneda (2 out of 2 patents)

Core Competencies:

Thermal Processing

Wafer Processing

Heat Treatment

Vertical Heat Treatment

Semiconductor Processing

Decompression Container

Combustion Device

Substrate Handling

Vapor Phase Reaction

Cleaning Method

Heat Treating Apparatus

Plasma Surface Treatments

44 patents: Sort by Forward Citations

1. 5884917 - Thermal processing apparatus (1999-03-23),

2. 5777300 - Processing furnace for oxidizing objects (1998-07-07),

3. 5750436 - Thermal processing method and apparatus therefor (1998-05-12),

4. 5697749 - Wafer processing apparatus (1997-12-16),

5. 5678989 - Heat treatment method using a vertical processing tube (1997-10-21),

6. 5671903 - Heat treatment apparatus and valve device for use in the same (1997-09-30),

7. 5662469 - Heat treatment method (1997-09-02),

8. 5645419 - Heat treatment method and device (1997-07-08),

9. 5622639 - Heat treating apparatus (1997-04-22),

10. 5578132 - Apparatus for heat treating semiconductors at normal pressure and low (1996-11-26),

11. 5571010 - Heat treatment method and apparatus (1996-11-05),

12. 5562383 - Treatment apparatus (1996-10-08),

13. 5554226 - Heat treatment processing apparatus and cleaning method thereof (1996-09-10),

14. 5551984 - Vertical heat treatment apparatus with a circulation gas passage (1996-09-03),

15. 5540782 - Heat treating apparatus having heat transmission-preventing plates (1996-07-30),

Tokyo Electron Tohoku Kabushiki Kaisha is a company based in Tokyo, Japan. They specialize in the design and manufacturing of semiconductor production equipment. With a strong commitment to innovation and advanced technology, they constantly strive to enhance their products and solutions, contributing to the growth of the global semiconductor industry.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

44 Patents

#66 in

#1,825 in Japan

#15,296 in the World

Tokyo Electron Tohoku Kabushiki Kaisha

Forward Citations = 1,826

68 inventors:

Wataru Okase (7 out of 34 patents)

Kenichi Yamaga (6 out of 38 patents)

Katsushin Miyagi (6 out of 9 patents)

4. Tetsu Ohsawa (4 out of 8 patents)

5. Kenji Homma (2 out of 4 patents)

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