Naoya Kaneda

Title: Naoya Kaneda: Innovator in Semiconductor Technology

Introduction

Naoya Kaneda is a prominent inventor based in Machida, Japan. He has made significant contributions to the field of semiconductor technology, holding two patents that showcase his innovative approach to heat treatment processes.

Latest Patents

One of Kaneda's latest patents is a heat treatment process for wafers. This process involves individually mounting a multiplicity of wafers on ring-shaped mounts of a wafer boat. The temperature within a reaction tube is initially set at approximately 400°C under a nitrogen gas atmosphere. After loading the wafer boat into the reaction tube, the temperature is raised to around 620°C at a rate of 100°C per minute. SiH4 gas is then supplied onto the surface of a silicon substrate to form a polysilicon film. Following film formation, air is forced to flow along the internal surface of the heating section to cool the interior of the reaction tube. This method also applies to forming a metal silicon film, where the temperature is set at about 100°C to suppress the growth of a natural oxidation film, thereby improving the characteristics of semiconductor devices.

Another notable patent is a heat treating device designed for exposing objects, such as semiconductor wafers, to heat treatment. This device includes a processing vessel, processing gas introduction nozzles, and a heat retention cylinder. The processing gases introduced from the nozzles are taken into the heat retention cylinder and released radially from the gas release opening at the top. This design allows for high intra-plane film thickness uniformity without the need to rotate the wafer boat.

Career Highlights

Kaneda has worked with notable companies in the semiconductor industry, including Tokyo Electron Limited and Tokyo Electron Tohoku Limited. His experience in these organizations has contributed to his expertise in semiconductor technology and innovation.

Collaborations

Throughout his career, Kaneda has collaborated with esteemed colleagues such as Toshimitsu Shibata and Toshiaki Miyaju. These collaborations have further enriched his work and contributions to the field.

Conclusion

Naoya Kaneda's innovative patents and career in semiconductor technology highlight his significant impact on the industry. His work continues to influence advancements in semiconductor manufacturing processes.