This inventor holds 12 USPTO granted patents. Top assignees: Oki Electric Industry Co., Ltd., Kahan Sendan Kikai Kabushiki Kaisha, Kohan Sendan Kikai Kabushikikaisha. Active years: 1980-2008.
Location History:
- Miyagi, JP (2001)
- Kanagawa, JP (2002)
- Anjo, JP (2003)
- Tokyo, JP (1980 - 2008)
Company Filing History:
Years Active: 1980-2008
Title: The Innovations of Toshio Nagata
Introduction
Toshio Nagata is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 12 patents. His work has been instrumental in advancing the production methods of semiconductor elements and nonvolatile semiconductor memory.
Latest Patents
One of Nagata's latest patents focuses on a method of producing semiconductor elements and nonvolatile semiconductor memory. In this invention, Tetraethyl Orthosilicate Si(OC2H5)4 is utilized as a film-forming material at a process temperature of 650°C ± 5°C to reduce crystal defects during deposition. Additionally, the patent describes a second embodiment where annealing is performed in a sparse oxygen gas atmosphere post-deposition to repair any crystal defects that may have occurred. Furthermore, the initial temperature of the CVD device is maintained at approximately 400°C to prevent the natural oxidation of the deposition surface, ensuring that the production conditions of the semiconductor element remain optimal. The CVD device is then heated to a temperature of about 750°C or 650°C to facilitate oxide deposition.
Career Highlights
Throughout his career, Toshio Nagata has worked with notable companies, including Oki Electric Industry Co., Ltd. His expertise in semiconductor technology has led to numerous advancements in the field.
Collaborations
Nagata has collaborated with several talented individuals, including Takeshi Yamamoto and Kenji Suzuki. Their combined efforts have contributed to the success of various projects in semiconductor innovation.
Conclusion
Toshio Nagata's contributions to semiconductor technology through his innovative patents and collaborations have significantly impacted the industry. His work continues to influence advancements in the production of semiconductor elements and nonvolatile memory.