Oki Electric Industry Co., Ltd.

Other

Kohan Sendan Kikai Kabushikikaisha

Kahan Sendan Kikai Kabushiki Kaisha

Token Kogyo Co., Ltd.

Toshio Nagata

Hiroshi Yamamoto

Kenji Suzuki

Hiroaki Uchida

Hirotaka Mori

Minoru Yoshida

Koichi Nakamura

Hidetsugu Uchida

Naoto Ogasawara

Takeshi Yamamoto

Katsuji Yoshida

Hiroki Takata

Takashi Ohsako

Makoto Nakazawa

Yoshirou Tsurugida

Akihiko Ohara

Kazukuni Tamaki

Yoichiro Goto

Jinichi Akayama

In a first embodiment, Tetraethyl Orthosilicate Si(OC2H5)4 is used at the process temperature of 650&#xb0; C.&#xb1;5&#xb0; C. as film forming material, to decrease crystal defects occurring during deposition. In a second embodiment, annealing is carried out in sparse oxygen gas atmosphere after deposition, to mend crystal defects that occurred during deposition. In a third embodiment, initial temperature of the CVD device is kept at about 400&#xb0; C., whereby the start of natural oxidation of the deposition surface is prevented and production circumstances of the semiconductor element is not deteriorated. Then, the CVD device is heated up to CVD temperature of about 750&#xb0; C. or about 650&#xb0; C., to deposit oxide.

Method of producing semiconductor element and nonvolatile semiconductor memory produced by this method

A method of fabricating a semiconductor device includes the steps of forming a first film of silicon nitride or silicon oxynitride on a polysilicon layer, forming a second film of silicon oxide on the first film by chemical vapor deposition, and oxygen-annealing the second film to form a tunnel oxide film. The presence of the silicon nitride or silicon oxynitride film enables an annealing process with a high oxidation capability to be used without oxidizing the polysilicon layer. The leakage of unwanted current through the tunnel oxide film can thereby be reduced, improving the data retention characteristics of devices such as flash memories.

Method of fabricating a semiconductor device including a tunnel oxide film

The present invention protects a thin wire connection from oscillation of a resin protecting an electronic circuit module from vibration, impact, and corrosion. An electronic control unit including an electronic circuit module in which a bare chip is mounted on a circuit board and a case for housing the module, is provided, wherein the case is filled with a potting gel to protect the module. The bare chip, including its wire connection to the circuit board, is sealed in advance with a gelatinous resin having thixotropy prior to hardening. The gelatinous substance cures to form a hardened inner layer which has a penetration that is lower than that of the filled potting gel after hardening, and functions to eliminate or substantially reduce the affect of viscoelastic oscillation of the outer layer on the bare chip and the wire connection.

Electronic control unit

A method for forming an insulating film is provided which is capable of inhibiting spontaneous growth of a silicon oxide film formed on a silicon substrate and an increase in thickness of a film caused by exposure to an atmosphere. After having allowed a silicon dioxide layer with a predetermined thickness to grow on a surface of a silicon crystal, a surface of the silicon dioxide is exposed to organic gas containing no hydroxyl group or is exposed to ammonia gas.

Method for forming insulating film and for manufacturing integrated circuit

An explosion-proof tape is wound on an outer circumference of a panel portion of a cathode-ray tube and a metal band is shrink-fitted on the tape. The tape is composed of a support having at least a layer composed of propylene polymer with a propylene content of not less than 40 weight % or styrene polymer with a styrene content of not less than 50 weight % and an adhesive layer formed on one surface of the support in a manner so that a plurality of fibers with a softening point of not lower than 200&deg; C. are buried in the adhesive layer in a lengthwise direction of the tape. An explosion-proof structure of a cathode-ray tube, wherein a metal band is shrink-fitted on an outer circumference of a panel portion of a cathode-ray tube, through a layer which is formed by winding such an explosion-proof tape as mentioned above, through its adhesive layer.

Explosion-proof tape for cathode-ray tube and explosion-proof structure thereof

A method of making a semiconductor device comprises forming a gate electrode on a semiconductor substrate, forming a diffusion layer in the semiconductor substrate, forming a first SiO2 film on a bottom surface of the semiconductor substrate and second SiO2 film on an upper surface of the semiconductor substrate, removing the second SiO2 film, forming a CoSi2 film on the diffusion, and removing an undesired cobalt from the first SiO2 film.

Method of making a semiconductor device

A lower capacitor electrode is formed on an interlayer dielectric, and then a resultant specimen is subjected to reduction and thermal nitriding in an ammonia gas atmosphere in a deposition chamber wherein pressure has been reduced to a range from 533 Pa to 1333 Pa. A silicon nitride film is then formed on the lower electrode and the interlayer dielectric. A time for carrying out the reduction and thermal nitriding is longer than a film thickness saturation time of the silicon nitride film formed on the interlayer dielectric.

Manufacturing method for semiconductor device

The invention provides a power transmission apparatus which includes a power transmission shaft having a pair of universal joints provided at the opposite ends thereof, and a torsion detection apparatus for detecting a torsion of the power transmission shaft when the power transmission shaft is acted upon by a rotating force. The torsion detection apparatus includes a pair of rotatable members mounted on the power transmission shaft for rotation together with the power transmission shaft and a detection means. The rotatable members have at least one pair of opposing portions which are opposed to each other in a spaced relationship from each other around the power transmission shaft, and the detection means includes a sensor mounted on one of the opposing portions of the rotatable members for detecting an approach of the other opposing portion to the one opposing portion.

Torsion detection apparatus for power transmission shaft and power

A roller leveler comprises a raisable upper work roll group, and a lower work roll group, the upper and lower work roll groups being arranged in a zigzag form so that the axes of three work rolls adjacent to each other at upper and lower sides and three points of intersection with the plane crossing these axes may make three vertexes of an isosceles triangle, with alternate lower work rolls in the lower work roll group being raisable to act as upper work rolls when a relatively thick hoop is leveled.

Roller leveler

A device for roasting meats having meat holding portion, a casing, a guide lever, a spring body, a roasting portion, and a lever for operation. In this device, the meat is roasted from both sides in the roasting portion and movement of the meat into and out of the roasting portion is performed by a remote control from outside of the casing. The roasting portion, grills, for roasting and guide rails which guide the grills to the roasting portion are secured in the casing. Further, a heating opening is provided at the upper surface of the casing so as to use the heat in the roasting portion to keep roasted meat warm.

Device for roasting meats

An electromagnetic lifting device comprising a plurality of electromagnets having a variety of individual magnetic pole face areas and an inverted generally U- or W-shape connected with each other and further rigidly connected to a suspension member, and specifically adapted to electromagnetically lift up only a single sheet of ferromagnetic metal sheet by energizing a selected one or plurality of the electromagnets to an extent of necessary and enough electromagnetic energy in accordance with a thickness of the single sheet of metal and exerting thus-produced electromagnetic force to that single sheet of metal so that only that single sheet of metal can be lifted upwardly away from a pile of such metal sheets.

Growing community of inventors

Tokyo, Japan

Toshio Nagata