The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2002
Filed:
Sep. 05, 2001
Applicant:
Inventor:
Toshio Nagata, Tokyo, JP;
Assignee:
Oki Electric Industry Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/144 ;
U.S. Cl.
CPC ...
H01L 2/144 ;
Abstract
A method of making a semiconductor device comprises forming a gate electrode on a semiconductor substrate, forming a diffusion layer in the semiconductor substrate, forming a first SiO2 film on a bottom surface of the semiconductor substrate and second SiO2 film on an upper surface of the semiconductor substrate, removing the second SiO2 film, forming a CoSi2 film on the diffusion, and removing an undesired cobalt from the first SiO2 film.