Toshihiro Yamaguchi

Title: Inventor Toshihiro Yamaguchi: Innovating Photoresist Technologies

Introduction

Toshihiro Yamaguchi is a noted inventor based in Kawasaki, Japan, known for his contributions to the field of photoresist materials. With a total of two patents to his name, Yamaguchi is recognized for his innovative approaches to thick-film resist technologies that play a critical role in semiconductor manufacturing.

Latest Patents

Yamaguchi's latest patents reflect his commitment to enhancing photoresist compositions. One of his patents, titled "Positive Resist Composition for Forming Thick-Film Resist," describes a composition that is capable of forming thick-film resists with a thickness range of 1 to 15 μm. This composition includes a unique resin component that features a polymer compound with a weight average molecular weight between 20,000 to 50,000, which incorporates structural units derived from hydroxystyrene and acrylate esters. Additionally, it includes an acid generator component that functions effectively under exposure conditions.

Another notable patent by Yamaguchi is for a "Chemically Amplified Positive Photo Resist Composition and Method for Forming Resist Pattern." This innovation focuses on a chemical amplification type photoresist that exhibits excellent storage stability. The process involves a novolak resin or a hydroxystyrenic resin, which is reacted with a crosslinking agent, resulting in a resin that enhances solubility in the presence of an acid. This technological advancement significantly improves the characteristics of resist solutions used in photolithography.

Career Highlights

Toshihiro Yamaguchi currently works at Tokyo Ohka Kogyo Co., Ltd., a company renowned for its specialty in electronic materials and photoresist technologies. His work revolves around developing advanced materials that meet the precise demands of modern semiconductor fabrication, contributing to the field with his innovative patent filings and research.

Collaborations

Yamaguchi collaborates closely with fellow innovators and researchers, including Masahiro Masujima and Kenji Maruyama. These partnerships foster a dynamic exchange of ideas and expertise, facilitating advancements in their shared field of research.

Conclusion

Toshihiro Yamaguchi continues to push the boundaries of photoresist technology through his innovative patents and collaborative efforts. His work at Tokyo Ohka Kogyo Co., Ltd. not only highlights his individual talent but also contributes to the ongoing evolution of materials crucial for the semiconductor industry. As the demand for advanced technologies grows, Yamaguchi's inventions are set to play an integral role in the future of electronic manufacturing.