Toru Sato

Title: Toru Sato: Innovator in Thermal Processing Technologies

Introduction

Toru Sato is a prominent inventor based in Tokyo-to, Japan. He has made significant contributions to the field of thermal processing, holding a total of 2 patents. His innovative approaches have advanced the methods used in the treatment of various substrates.

Latest Patents

Sato's latest patents include a heat treatment method and a heat treatment apparatus. The first patent describes a thermal processing method that involves multiple steps. In the initial step, thin films are formed on the surfaces of first substrates with reduced consumption of process gas. The subsequent steps involve using second substrates and production substrates, with adjustments made to heating units based on previous temperature settings.

The second patent focuses on a method for oxidizing an object to be processed. This method allows for the creation of high-quality oxide films and a laminate structure of nitride and oxide films. The oxidation occurs in a vacuum atmosphere, ensuring uniformity and quality in the resulting films.

Career Highlights

Toru Sato is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work has been instrumental in developing advanced thermal processing technologies that are crucial for modern manufacturing.

Collaborations

Sato has collaborated with notable colleagues such as Tsukasa Yonekawa and Keisuke Suzuki. Their combined expertise has contributed to the success of various projects within the company.

Conclusion

Toru Sato's innovative work in thermal processing technologies has established him as a key figure in his field. His patents reflect a commitment to advancing manufacturing techniques and improving the quality of processed materials.