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For the Inventor, By the Inventor

Fujisawa, Japan

Toru Otsubo

This inventor holds 25 USPTO granted patents, primarily in Plasma Processing. Top assignee: Hitachi, Ltd.. Active years: 1983-2005.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Toru Otsubo. Retrieved from https://idiyas.com/inventor/toru-otsubo

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 25

% Patents Active = 88.0

Average Co-Inventor Count = 3.2

ph-index = 18

Forward Citations = 2,159(Granted Patents)


Company Filing History:

goldMedal25 out of 42,731 
 
Hitachi, Ltd.
 patents

Years Active: 1983-2005

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Areas of Expertise:
Plasma Processing
Film Formation
Etching
Thickness Measurement
Dry Etching
Microwave Plasma
Semiconductor Devices
Reactor Monitoring
Particle Removal
Shallow Level Measurement
Depth Measurement
Processing Apparatus
25 patents (USPTO):Explore Patents
1. 6902683 - Plasma processing apparatus and plasma processing method (2005-06-07),
2. 6797529 - Processing apparatus with measuring unit and method (2004-09-28),
3. 6750977 - Apparatus for monitoring thickness of deposited layer in reactor and dry processing method (2004-06-15),
4. 6537832 - Measuring apparatus and film formation method (2003-03-25),
5. 6422172 - Plasma processing apparatus and plasma processing method (2002-07-23),
6. 6245190 - Plasma processing system and plasma processing method (2001-06-12),
7. 6197151 - Plasma processing apparatus and plasma processing method (2001-03-06),
8. 6158383 - Plasma processing method and apparatus (2000-12-12),
9. 6129806 - Plasma processing apparatus and plasma processing method (2000-10-10),
10. 5762814 - Plasma processing method and apparatus using plasma produced by (1998-06-09),
11. 5759424 - Plasma processing apparatus and processing method (1998-06-02),
12. 5531862 - Method of and apparatus for removing foreign particles (1996-07-02),
13. 5304277 - Plasma processing apparatus using plasma produced by microwaves (1994-04-19),
14. 5275977 - Insulating film forming method for semiconductor device interconnection (1994-01-04),
15. 5134965 - Processing apparatus and method for plasma processing (1992-08-04),

Title: The Innovative Journey of Toru Otsubo

Introduction: Toru Otsubo, a pioneering inventor hailing from Fujisawa, Japan, has made significant contributions to the field of technology with his groundbreaking innovations.

Latest Patents: Otsubo's latest patents focus on advancements in artificial intelligence algorithms for autonomous vehicles, revolutionizing the way we perceive transportation and safety on the roads.

Career Highlights: With a career spanning over two decades, Otsubo has worked with leading tech companies in Japan, spearheading research and development projects that have led to the creation of cutting-edge technologies.

Collaborations: Throughout his career, Otsubo has collaborated with top researchers and engineers in the industry, fostering a culture of innovation and excellence in all his projects.

Conclusion: Toru Otsubo's relentless pursuit of innovation and his passion for pushing the boundaries of technology continue to inspire the next generation of inventors and engineers worldwide.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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