Company Filing History:
Years Active: 2013-2016
Title: Tomoyuki Morita: Innovator in Charged Particle Beam Technology
Introduction
Tomoyuki Morita is a prominent inventor based in Utsunomiya, Japan. He has made significant contributions to the field of charged particle beam technology, holding a total of 7 patents. His work focuses on advanced drawing apparatuses and methods for manufacturing articles, showcasing his expertise and innovative spirit.
Latest Patents
Morita's latest patents include a drawing apparatus and a method of manufacturing articles. The first patent describes a drawing apparatus designed to perform drawing on a substrate using multiple charged particle beams. This apparatus features a blanker array with first and second groups, each containing at least one blanker. It also includes a deflector that scans the charged particle beams on the substrate and a controller that supplies control signals to the groups at specific timings. This design compensates for positional differences in the drawing regions, enhancing precision in the drawing process.
The second patent outlines a drawing apparatus that consists of multiple charged particle optical systems arranged in a specific pitch. Each system is configured to irradiate a substrate with charged particle beams. The apparatus includes a stage that holds the substrate and moves it relative to the optical systems. A controller determines the charged particle beams for drawing, ensuring that the relationship between various parameters is satisfied, which is crucial for achieving high-quality results.
Career Highlights
Tomoyuki Morita is currently employed at Canon Kabushiki Kaisha, a leading company in imaging and optical products. His work at Canon has allowed him to push the boundaries of technology in the field of charged particle beams. His innovative designs and methods have contributed to advancements in manufacturing processes and precision engineering.
Collaborations
Some of Morita's notable coworkers include Masato Muraki and Shinji Ohishi. Their collaboration has fostered an environment of innovation and creativity, leading to the development of cutting-edge technologies in their field.
Conclusion
Tomoyuki Morita's contributions to charged particle beam technology exemplify his dedication to innovation and excellence. His patents reflect a deep understanding of complex systems and a commitment to advancing manufacturing techniques. Through his work at Canon, he continues to influence the industry and inspire future innovations.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.