The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2015
Filed:
Jun. 24, 2014
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Masato Muraki, Inagi, JP;
Tomoyuki Morita, Utsunomiya, JP;
Assignee:
CANON KABUSHIKI KAISHA, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/317 (2006.01); H01J 37/244 (2006.01); H01J 37/30 (2006.01); H01J 37/04 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3177 (2013.01); H01J 37/045 (2013.01); H01J 37/244 (2013.01); H01J 37/3007 (2013.01);
Abstract
A drawing apparatus for performing drawing on a substrate with a charged particle beam, includes: a controller configured to control a dose of the charge particle beam at each of a plurality of positions of the charged particle beam on the substrate based on information of displacement of each of the plurality of positions from a target position corresponding thereto and a target dose of the charged particle beam at the target position corresponding to each of the plurality of positions.