The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2015
Filed:
Jun. 24, 2014
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Tomoyuki Morita, Utsunomiya, JP;
Masato Muraki, Inagi, JP;
Assignee:
CANON KABUSHIKI KAISHA, , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21K 1/08 (2006.01); H01J 3/14 (2006.01); H01J 3/26 (2006.01); H01J 49/42 (2006.01); H01J 37/04 (2006.01); H01J 37/30 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H01J 37/045 (2013.01); H01J 37/3007 (2013.01); H01J 37/3177 (2013.01);
Abstract
The present invention provides a blanking apparatus comprising a plurality of blankers configured to respectively blank a plurality of beams with respect to a target position on an object, and a driving device configured to drive the plurality of blankers, wherein the driving device includes a change device configured to change relation between a combination of beams of the plurality of beams, and a target dose.