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For the Inventor, By the Inventor

Tokyo, Japan

Tomonori Kawasaki

This inventor holds 6 USPTO granted patents. Top assignee: Sumco Corporation. Active years: 2014-2020.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Tomonori Kawasaki. Retrieved from https://idiyas.com/inventor/tomonori-kawasaki

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank
USPTO Granted Patents = 6

% Patents Active = 100.0

Average Co-Inventor Count = 1.1

ph-index = 1

Forward Citations = 8(Granted Patents)


Company Filing History:

goldMedal6 out of 626 
 
Sumco Corporation
 patents

Years Active: 2014-2020

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6 patents (USPTO):Explore Patents
1. 10744616 - Wafer polishing method and apparatus (2020-08-18),
2. 10391607 - Single-wafer processing method of polishing one side of semiconductor wafer and single-wafer processing apparatus for polishing one side of semiconductor wafer (2019-08-27),
3. 9919402 - Method of polishing wafer and wafer polishing apparatus (2018-03-20),
4. 9630292 - Single side polishing apparatus for wafer (2017-04-25),
5. 9266213 - Method of polishing one side of wafer and single side polishing apparatus for wafer (2016-02-23),
6. 8664092 - Method for cleaning silicon wafer, and method for producing epitaxial wafer using the cleaning method (2014-03-04),

Title: Tomonori Kawasaki: Innovator in Wafer Polishing Technology

Introduction

Tomonori Kawasaki is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor manufacturing, particularly in wafer polishing technology. With a total of 6 patents to his name, Kawasaki continues to push the boundaries of innovation in this critical area of technology.

Latest Patents

Kawasaki's latest patents include a wafer polishing method and apparatus designed to enhance the efficiency and effectiveness of the polishing process. This method involves rotating a platen with an affixed polishing pad while supplying slurry and applying pressure to the wafer. The process includes calculating an F/T value by monitoring the load current of the motor and the surface temperature of the polishing pad. This data is then used to control the rotation speed and polishing pressure, ensuring optimal results. Another notable patent is a single-wafer processing method that aims to increase the flatness of semiconductor wafers while reducing variations in flatness. This method includes multiple polishing steps and a shifting step to enhance the overall quality of the wafer.

Career Highlights

Kawasaki is currently employed at Sumco Corporation, a leading company in the semiconductor industry. His work focuses on developing advanced polishing techniques that are essential for producing high-quality semiconductor wafers. His innovative approaches have garnered attention and respect within the industry.

Collaborations

Kawasaki collaborates with Ryoya Terakawa, a fellow innovator in the field. Together, they work on projects that aim to improve wafer processing techniques and contribute to advancements in semiconductor technology.

Conclusion

Tomonori Kawasaki is a key figure in the realm of wafer polishing technology, with a strong portfolio of patents that reflect his innovative spirit. His contributions continue to shape the future of semiconductor manufacturing, making him a notable inventor in this field.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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