Tokyo, Japan

Tomoko Owada

USPTO Granted Patents = 14 

Average Co-Inventor Count = 6.4

ph-index = 4

Forward Citations = 51(Granted Patents)


Company Filing History:


Years Active: 2019-2024

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14 patents (USPTO):

Title: The Innovative Contributions of Tomoko Owada

Introduction

Tomoko Owada is a prominent inventor based in Tokyo, Japan. She has made significant contributions to the field of technology, particularly in the development of advanced polishing apparatuses and substrate holding devices. With a total of 14 patents to her name, Owada's work has had a substantial impact on the industry.

Latest Patents

Among her latest patents are innovations such as an elastic membrane, a substrate holding device, and a polishing apparatus. The elastic membrane is designed to be used in a polishing head and features a contact portion that comes into contact with a wafer. It includes an annular side wall, a first partition wall, and a second partition wall, which together create an edge pressure chamber for pressing the wafer's edge. Additionally, her substrate holding apparatus is capable of precisely adjusting the polishing profile. This apparatus incorporates an elastic membrane that forms multiple pressure chambers for effective substrate pressing.

Career Highlights

Owada's career is marked by her dedication to innovation and excellence in her field. Her work at Ebara Corporation has allowed her to explore and develop cutting-edge technologies that enhance the efficiency and effectiveness of polishing processes. Her patents reflect her commitment to advancing the capabilities of substrate holding and polishing technologies.

Collaborations

Throughout her career, Tomoko Owada has collaborated with notable colleagues such as Osamu Nabeya and Shingo Togashi. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies.

Conclusion

Tomoko Owada's contributions to the field of technology through her patents and innovations are commendable. Her work continues to influence the industry, showcasing her talent and dedication as an inventor.

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