Company Filing History:
Years Active: 2019-2024
Title: The Innovative Contributions of Tomoko Owada
Introduction
Tomoko Owada is a prominent inventor based in Tokyo, Japan. She has made significant contributions to the field of technology, particularly in the development of advanced polishing apparatuses and substrate holding devices. With a total of 14 patents to her name, Owada's work has had a substantial impact on the industry.
Latest Patents
Among her latest patents are innovations such as an elastic membrane, a substrate holding device, and a polishing apparatus. The elastic membrane is designed to be used in a polishing head and features a contact portion that comes into contact with a wafer. It includes an annular side wall, a first partition wall, and a second partition wall, which together create an edge pressure chamber for pressing the wafer's edge. Additionally, her substrate holding apparatus is capable of precisely adjusting the polishing profile. This apparatus incorporates an elastic membrane that forms multiple pressure chambers for effective substrate pressing.
Career Highlights
Owada's career is marked by her dedication to innovation and excellence in her field. Her work at Ebara Corporation has allowed her to explore and develop cutting-edge technologies that enhance the efficiency and effectiveness of polishing processes. Her patents reflect her commitment to advancing the capabilities of substrate holding and polishing technologies.
Collaborations
Throughout her career, Tomoko Owada has collaborated with notable colleagues such as Osamu Nabeya and Shingo Togashi. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies.
Conclusion
Tomoko Owada's contributions to the field of technology through her patents and innovations are commendable. Her work continues to influence the industry, showcasing her talent and dedication as an inventor.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.